Improved understanding of electron density and temperature in a low pressure VHF-CCP from kinetic simulation

Author(s):  
Peter H. Stoltz ◽  
Marcel Fiebrandt ◽  
Katharina Stapelmann ◽  
Peter Awakowicz
1989 ◽  
Vol 50 (C1) ◽  
pp. C1-559-C1-564
Author(s):  
F. P. KEENAN ◽  
R. BARNSLEY ◽  
J. DUNN ◽  
K. D. EVANS ◽  
S. M. McCANN ◽  
...  

2013 ◽  
Vol 25 (4) ◽  
pp. 2192-2198 ◽  
Author(s):  
M.A. Naeem ◽  
M. Iqbal ◽  
N. Amin ◽  
M. Musadiq ◽  
Y. Jamil ◽  
...  

The instruments which measure electron density and temperature are quite separate and independent in operation, but on account of the limitations in power supply and telemetry data rate the two experiments share the same power lines and some data channels.


1986 ◽  
Vol 59 (7) ◽  
pp. 2324-2331 ◽  
Author(s):  
H. J. Cornelissen ◽  
H. J. H. Merks‐Eppingbroek

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