Improved understanding of electron density and temperature in a low pressure VHF-CCP from kinetic simulation
2019 ◽
Vol 28
(6)
◽
pp. 065012
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1999 ◽
Vol 32
(8)
◽
pp. 898-905
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1989 ◽
Vol 50
(C1)
◽
pp. C1-559-C1-564
Keyword(s):
2010 ◽
Vol 43
(50)
◽
pp. 505203
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Keyword(s):
1980 ◽
Vol 13
(2)
◽
pp. L25-L28
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2013 ◽
Vol 25
(4)
◽
pp. 2192-2198
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1969 ◽
Vol 311
(1507)
◽
pp. 501-516
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Keyword(s):