scholarly journals Physical properties of HWCVD microcrystalline silicon thin films

2003 ◽  
Author(s):  
H.R. Moutinho ◽  
M.J. Romero ◽  
C.-S. Jiang ◽  
Y. Xu ◽  
B.P. Nelson ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Microcrystalline silicon thin films: A review of physical properties

2008 ◽  
Vol 39 (11) ◽  
pp. 1292-1295 ◽  
Author(s):  
A. Dussan ◽  
R.H. Buitrago ◽  
R.R. Koropecki
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films

New two-step growth of microcrystalline silicon thin films without incubation layer

2011 ◽  
Vol 322 (1) ◽  
pp. 1-5 ◽  
Author(s):  
Hongyun Yue ◽  
Aimin Wu ◽  
Xueyu Zhang ◽  
Tingju Li
Keyword(s):  
Thin Films ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
Step Growth
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