Improvement of MOSFET subthreshold leakage current by its irradiation with hydrogen radicals generated in microwave-excited high-density inert gas plasma

Author(s):  
Y. Saito ◽  
H. Takahashi ◽  
K.O. Ohtsubo ◽  
M. Hirayama ◽  
S. Sugawa ◽  
...  
Author(s):  
J.W. Slotboom ◽  
H.A. Harwig ◽  
M.J.M. Pelgrom

2015 ◽  
Vol 193 (3) ◽  
pp. 17-23 ◽  
Author(s):  
Fumihiko Komatsu ◽  
Manabu Tanaka ◽  
Tomoyuki Murakami ◽  
Yoshihiro Okuno

Author(s):  
Turki Alnuayri ◽  
Saqib Khursheed ◽  
Antonio Leonel Hernandez Martinez ◽  
Daniele Rossi

2020 ◽  
Vol MA2020-01 (22) ◽  
pp. 1298-1298
Author(s):  
Min-Ci Wu ◽  
Yi-Hsin Ting ◽  
Jui-Yuan Chen ◽  
Wen-Wei Wu

1998 ◽  
Vol 37 (Part 1, No. 3A) ◽  
pp. 771-775
Author(s):  
Eiji Maruyama ◽  
Yoshihiro Hishikawa ◽  
Makoto Tanaka ◽  
Seiichi Kiyama ◽  
Shinya Tsuda

Sign in / Sign up

Export Citation Format

Share Document