A sub-0.1°/h bias-instability MEMS gyroscope using resonant constant-frequency driving technique

Author(s):  
Haibin Wu ◽  
Xudong Zheng ◽  
Yaojie Shen ◽  
Xuetong Wang ◽  
Zhonghe Jin ◽  
...  
2021 ◽  
pp. 1-1
Author(s):  
Haibin Wu ◽  
Xudong Zheng ◽  
Xuetong Wang ◽  
Yaojie Shen ◽  
Zhipeng Ma ◽  
...  

Micromachines ◽  
2019 ◽  
Vol 10 (8) ◽  
pp. 496
Author(s):  
Cheng Li ◽  
Bo Yang ◽  
Xin Guo ◽  
Lei Wu

A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813 ∘ /h and an ARW (Angular Random Walk) of 0.0117 ∘ / h . Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.


2017 ◽  
pp. 1-1 ◽  
Author(s):  
D. Maeda ◽  
K. Ono ◽  
J. Giner ◽  
M. Matsumoto ◽  
M. Kanamaru ◽  
...  

2019 ◽  
Vol 2019 ◽  
pp. 1-19 ◽  
Author(s):  
Bo Yang ◽  
Lei Wu ◽  
Chengfu Lu ◽  
Gang Wang

A digital mode-matching control system based on feedback calibration, where two pilot tones are applied to actuate the sense mode by the robust feedback controller, is presented for a MEMS gyroscope in this paper. A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tuning mechanisms, the quadrature correction electrode, and the feedback electrode is adopted to implement mode-matching control. Compared with the previous mode-matching method of forward excitation calibration, the proposed mode-matching scheme based on feedback calibration has better adaptability to the variation in the frequency of calibration pilot tones and the quality factor of the sense mode. The influences of calibration pilot tone frequency and the amplitude ratio on tuning performance are studied in theory and simulation. The simulation results demonstrate that the tuning error due to the amplitude asymmetry of the sense mode increases with a frequency split between pilot tones and the drive mode and is significantly reduced by the amplitude correction technology of pilot tones. In addition, the influence of key parameters on the stability of the mode-matching system is deduced by using the average analysis method. The MATLAB simulation of the mode-matching control system illustrates that simulation results have a good consistency with theoretical analysis, which verifies the effectiveness of the closed-loop mode-matching control system. The entire mode-matching control system based on a FPGA device is implemented combined with a closed-loop self-excitation drive, closed-loop force feedback control, and quadrature error correction control. Experimental results demonstrate that the mode-matching prototype has a bias instability of 0.63°/h and ARW of 0.0056°/h1/2. Compared with the mode-mismatched MEMS gyroscope, the performances of bias instability and ARW are improved by 3.81 times and 4.20 times, respectively.


2019 ◽  
Vol 28 (4) ◽  
pp. 586-596 ◽  
Author(s):  
Tobias Hiller ◽  
Zsigmond Pentek ◽  
Jan-Timo Liewald ◽  
Alexander Buhmann ◽  
Hubert Roth

2018 ◽  
Vol 53 (9) ◽  
pp. 2636-2650 ◽  
Author(s):  
Yang Zhao ◽  
Jian Zhao ◽  
Xi Wang ◽  
Guo Ming Xia ◽  
Qin Shi ◽  
...  

Sensors ◽  
2018 ◽  
Vol 18 (12) ◽  
pp. 4471 ◽  
Author(s):  
Changhui Jiang ◽  
Shuai Chen ◽  
Yuwei Chen ◽  
Yuming Bo ◽  
Lin Han ◽  
...  

Microelectromechanical System (MEMS) Inertial Measurement Unit (IMU) is popular in the community for constructing a navigation system, due to its small size and low power consumption. However, limited by the manufacturing technology, MEMS IMU experiences more complicated noises and errors. Thus, noise modeling and suppression is important for improving accuracy of the navigation system based on MEMS IMU. Motivated by this problem, in this paper, a deep learning method was introduced to MEMS gyroscope de-noising. Specifically, a recently popular Recurrent Neural Networks (RNN) variant Simple Recurrent Unit (SRU-RNN) was employed in MEMS gyroscope raw signals de-noising. A MEMS IMU MSI3200 from MT Microsystem Company was employed in the experiments for evaluating the proposed method. Following two problems were furtherly discussed and investigated: (1) the employed SRU with different training data length were compared to explore whether there was trade-off between the training data length and prediction performance; (2) Allan Variance was the most popular MEMS gyroscope analyzing method, and five basic parameters were employed to describe the performance of different grade MEMS gyroscope; among them, quantization noise, angle random walk, and bias instability were the major factors influencing the MEMS gyroscope accuracy, the compensation results of the three parameters for gyroscope were presented and compared. The results supported the following conclusions: (1) considering the computation brought from training dataset, the values of 500, 3000, and 3000 were individually sufficient for the three-axis gyroscopes to obtain a reliable and stable prediction performance; (2) among the parameters, the quantization noise, angle random walk, and bias instability performed 0.6%, 6.8%, and 12.5% improvement for X-axis gyroscope, 60.5%, 17.3%, and 34.1% improvement for Y-axis gyroscope, 11.3%, 22.7%, and 35.7% improvement for Z-axis gyroscope, and the corresponding attitude errors decreased by 19.2%, 82.1%, and 69.4%. The results surely demonstrated the effectiveness of the employed SRU in this application.


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