A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control

A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813 ∘ /h and an ARW (Angular Random Walk) of 0.0117 ∘ / h . Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.

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An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) ◽

10.1109/transducers.2013.6626699 ◽

2013 ◽

Cited By ~ 6

Author(s):

C. H. He ◽

Q. C. Zhao ◽

D. C. Liu ◽

L. G. Dong ◽

Z. C. Yang ◽

...

Keyword(s):

Neural Network ◽

Real Time ◽

Network Control ◽

Mode Matching ◽

Neural Network Control ◽

Mems Gyroscope ◽

Real Time Mode

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A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

Journal of Sensors ◽

10.1155/2019/9894367 ◽

2019 ◽

Vol 2019 ◽

pp. 1-19 ◽

Cited By ~ 2

Author(s):

Bo Yang ◽

Lei Wu ◽

Chengfu Lu ◽

Gang Wang

Keyword(s):

Control System ◽

Closed Loop ◽

Frequency Tuning ◽

Amplitude Ratio ◽

Mode Matching ◽

Sense Mode ◽

Mems Gyroscope ◽

Average Analysis ◽

Simulation Results ◽

Bias Instability

A digital mode-matching control system based on feedback calibration, where two pilot tones are applied to actuate the sense mode by the robust feedback controller, is presented for a MEMS gyroscope in this paper. A dual-mass decoupled MEMS gyroscope with the integrated electrostatic frequency tuning mechanisms, the quadrature correction electrode, and the feedback electrode is adopted to implement mode-matching control. Compared with the previous mode-matching method of forward excitation calibration, the proposed mode-matching scheme based on feedback calibration has better adaptability to the variation in the frequency of calibration pilot tones and the quality factor of the sense mode. The influences of calibration pilot tone frequency and the amplitude ratio on tuning performance are studied in theory and simulation. The simulation results demonstrate that the tuning error due to the amplitude asymmetry of the sense mode increases with a frequency split between pilot tones and the drive mode and is significantly reduced by the amplitude correction technology of pilot tones. In addition, the influence of key parameters on the stability of the mode-matching system is deduced by using the average analysis method. The MATLAB simulation of the mode-matching control system illustrates that simulation results have a good consistency with theoretical analysis, which verifies the effectiveness of the closed-loop mode-matching control system. The entire mode-matching control system based on a FPGA device is implemented combined with a closed-loop self-excitation drive, closed-loop force feedback control, and quadrature error correction control. Experimental results demonstrate that the mode-matching prototype has a bias instability of 0.63°/h and ARW of 0.0056°/h1/2. Compared with the mode-mismatched MEMS gyroscope, the performances of bias instability and ARW are improved by 3.81 times and 4.20 times, respectively.

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MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Sensors ◽

10.3390/s18093001 ◽

2018 ◽

Vol 18 (9) ◽

pp. 3001 ◽

Cited By ~ 8

Author(s):

Feng Bu ◽

Dacheng Xu ◽

Heming Zhao ◽

Bo Fan ◽

Mengmeng Cheng

Keyword(s):

Real Time ◽

Microelectromechanical Systems ◽

Control Variable ◽

Mode Frequency ◽

Mode Matching ◽

Sense Mode ◽

Zero Bias ◽

Real Time Mode ◽

Additional Force ◽

Force Signal

In order to solve the problem where existing mode-matching methods in microelectromechanical systems (MEMS) vibrating gyroscopes fail to meet real-time and reliability requirements, this paper presents a novel method to accomplish automatic and real-time mode-matching based on phase-shifted 45° additional force demodulation (45° AFD-RM). The phase-shifted 45° additional force signal has the same frequency as the quadrature force signal, but it is phase-shifted by 45° and applied to the sense mode. In addition, two-way phase-shifted 45° demodulations are used at the sense-mode detection output to obtain a phase metric that is independent of the Coriolis force and can reflect the mode-matching state. Then, this phase metric is used as a control variable to adaptively control the tuning voltage, so as to change the sense-mode frequency through the negative stiffness effect and ultimately achieve real-time mode-matching. Simulation and experimental results show that the proposed 45° AFD-RM method can achieve real-time matching. The mode frequency split is controlled within 0.1 Hz, and the gyroscope scale factor, zero-bias instability, and angle random walk are effectively improved.

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A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

IEEE Sensors Journal ◽

10.1109/jsen.2014.2371456 ◽

2015 ◽

Vol 15 (4) ◽

pp. 2069-2077 ◽

Cited By ~ 24

Author(s):

Chunhua He ◽

Qiancheng Zhao ◽

Qinwen Huang ◽

Dachuan Liu ◽

Zhenchuan Yang ◽

...

Keyword(s):

Robust Control ◽

Real Time ◽

Mode Matching ◽

Sense Mode ◽

Real Time Mode ◽

Vibratory Gyroscope

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Real-time Implementation and Application of Hodgkin–Huxley Model in Embedded System of Closed-Loop Electrophysiology Platform

2020 39th Chinese Control Conference (CCC) ◽

10.23919/ccc50068.2020.9189439 ◽

2020 ◽

Author(s):

Bo Gong ◽

Jiang Wang ◽

Xile Wei ◽

Siyuan Chang ◽

Ruofan Wang

Keyword(s):

Embedded System ◽

Real Time ◽

Closed Loop

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Faculty Opinions recommendation of Real-time closed-loop control in a rodent model of medically induced coma using burst suppression.

Faculty Opinions – Post-Publication Peer Review of the Biomedical Literature ◽

10.3410/f.718132854.793484860 ◽

2013 ◽

Author(s):

Ralph Lydic

Keyword(s):

Real Time ◽

Closed Loop ◽

Rodent Model ◽

Burst Suppression ◽

Closed Loop Control ◽

Loop Control

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A Playbook(trademark) for Real-Time, Closed-Loop Control

10.21236/ada439281 ◽

2005 ◽

Cited By ~ 1

Author(s):

Harry Funk ◽

Robert Goldman ◽

Christopher Miller ◽

John Meisner ◽

Peggy Wu

Keyword(s):

Real Time ◽

Closed Loop ◽

Closed Loop Control ◽

Loop Control

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Real-time FPGA model in the loop analysis of Permanent Magnet Synchronous Machine for LEV

2016 International Conference and Exposition on Electrical and Power Engineering (EPE) ◽

10.1109/icepe.2016.7781336 ◽

2016 ◽

Cited By ~ 4

Author(s):

Mircea Ruba ◽

Nagy Hunor ◽

Horia Hedesiu ◽

Claudia Martis

Keyword(s):

Permanent Magnet ◽

Real Time ◽

Synchronous Machine ◽

Permanent Magnet Synchronous Machine ◽

Loop Analysis

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Evaluation of Optimal Vibrotactile Feedback for Force-Controlled Upper Limb Myoelectric Prostheses

Sensors ◽

10.3390/s19235209 ◽

2019 ◽

Vol 19 (23) ◽

pp. 5209 ◽

Cited By ~ 1

Author(s):

Andrea Gonzalez-Rodriguez ◽

Jose L. Ramon ◽

Vicente Morell ◽

Gabriel J. Garcia ◽

Jorge Pomares ◽

...

Keyword(s):

Real Time ◽

Upper Limb ◽

Closed Loop ◽

Fine Tuning ◽

Vibrotactile Feedback ◽

Loop Control ◽

Myoelectric Prostheses ◽

Amplitude Level ◽

Real Time Application ◽

Selection Of

The main goal of this study is to evaluate how to optimally select the best vibrotactile pattern to be used in a closed loop control of upper limb myoelectric prostheses as a feedback of the exerted force. To that end, we assessed both the selection of actuation patterns and the effects of the selection of frequency and amplitude parameters to discriminate between different feedback levels. A single vibrotactile actuator has been used to deliver the vibrations to subjects participating in the experiments. The results show no difference between pattern shapes in terms of feedback perception. Similarly, changes in amplitude level do not reflect significant improvement compared to changes in frequency. However, decreasing the number of feedback levels increases the accuracy of feedback perception and subject-specific variations are high for particular participants, showing that a fine-tuning of the parameters is necessary in a real-time application to upper limb prosthetics. In future works, the effects of training, location, and number of actuators will be assessed. This optimized selection will be tested in a real-time proportional myocontrol of a prosthetic hand.

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