Macromodel for micromechanical, multi-electrode structures in force feedback control systems

Author(s):  
M. Handtmann ◽  
R. Aigner ◽  
F. Plotz ◽  
G. Wachutka
2020 ◽  
Vol 53 (2) ◽  
pp. 16745-16752
Author(s):  
Nuno M.G. Paulino ◽  
Mathias Foo ◽  
Tom F.A. de Greef ◽  
Jongmin Kim ◽  
Declan G. Bates

Sign in / Sign up

Export Citation Format

Share Document