Calibration of a thermal MEMS shear stress sensor array

Author(s):  
Jin-min Liang ◽  
Dang-guo Yang ◽  
Jian-qiang Li ◽  
Wei-min Jiang ◽  
Chun-yang Li
2007 ◽  
Vol 139 (1-2) ◽  
pp. 31-35 ◽  
Author(s):  
Kui Liu ◽  
Weizheng Yuan ◽  
Jinjun Deng ◽  
Binghe Ma ◽  
Chengyu Jiang

2019 ◽  
Vol 41 (20) ◽  
pp. 19-25 ◽  
Author(s):  
Zhengxin Zhao ◽  
Judith Gallman ◽  
Robert White

2008 ◽  
Vol 4 (3) ◽  
pp. 115-120
Author(s):  
K. Liu ◽  
W. Z. Yuan ◽  
B. H. Ma ◽  
S. Chen ◽  
C. Y. Jiang

Author(s):  
Baoyun Sun ◽  
Binghe Ma ◽  
Yuchao Yan ◽  
Chengyu Jiang ◽  
Weizheng Yuan ◽  
...  

2013 ◽  
Vol 562-565 ◽  
pp. 403-407
Author(s):  
Yong Ming Sun ◽  
Wu Liu ◽  
Hong Hai Chen ◽  
Wei Ping Zhang ◽  
Wen Yuan Chen ◽  
...  

Design, production and calibration of a novel flexible shear stress sensor array with double hot-wire based on MEMS are presented in this paper, which can be applied to measure the surface shear stress of air craft or underwater vehicles. The sensor array is successfully fabricated by MEMS process, the electrical bond pads of which are located at the backside, thus greatly reducing the interference of the measured flow filed. The calibration has been carried out in the wind tunnel experiment, and the value of calibration factor is 8.35mV/ (m/s) in a flow velocity range from 0 to 35 m/s. The results of test experiments prove that the shear sensor array is well capable of measuring the flow velocity of boundary layer.


2006 ◽  
Vol 03 (01) ◽  
pp. 9-14 ◽  
Author(s):  
KUI LIU ◽  
WEI-ZHENG YUAN ◽  
BING-HE MA ◽  
CHENG-YU JIANG ◽  
JIN-JUN DENG

At the boundary layer's separation point, the mean of the shear stress drops to a small value while its fluctuation increases dramatically. Based on the thermal method, we can fabricate a MEMS-based shear stress sensor array to bend with the curved surface, which can measure the shear stress profile of the boundary layer. This paper presents two methods, mean and RMS of the shear stress difference max value and the second order of the array signals difference algorithm, to calculate the location of the flow separation point. Through combination of the two methods and analyzing the 2D circular column CFD simulation data, the position of the separation point can be determined accurately.


2001 ◽  
Author(s):  
Venkataraman Chandrasekaran ◽  
Anthony Cain ◽  
Toshikazu Nishida ◽  
Louis Cattafesta ◽  
Mark Sheplak

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