In this paper, we propose a method to detect thermal transport suitable in nanometers scale. It is feasible using the GIDL-biased MOSFET as thermal sensor. It is because the GIDL current is occurred due to the band-to-band tunnelling of the electron in a small overlap region between
gate and drain. Using the relation between the thermal transport and the thermal properties (the heat resistivity and heat capacity), we conducted two ways to heat up. By generating heat in the step and sinusoidal wave form with a transistor and observing the response at other place, we were
able to estimate the speed of heat on the chip. The thermal response is measured by the GIDL current of another MOSFET. The speed of the heat generated at the MOSFET is measured about 2.12 m/s.
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor