Atomistic Modeling of Pocket Dopant Deactivation and Its Impact on $V_{\textrm {th}}$ Variation in Scaled Si Planar Devices Using an Atomistic Kinetic Monte Carlo Approach
2015 ◽
Vol 62
(6)
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pp. 1789-1795
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2015 ◽
Vol 163
(3)
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pp. A329-A337
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2019 ◽
Vol 24
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pp. 1-11
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2009 ◽
Vol 267
(18)
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pp. 3002-3008
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2017 ◽
Vol 493
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pp. 280-293
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2020 ◽
Vol 09
(04)
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pp. 2050022
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