Prediction of a Radial Variation of Plasma Structure and Ion Distributions in the Wafer Interface in Two-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (1) ◽  
pp. 90-100 ◽  
Author(s):  
T. Yagisawa ◽  
K. Maeshige ◽  
T. Shimada ◽  
T. Makabe
Keyword(s):  
Radial Variation ◽  
Plasma Structure ◽  
Capacitively Coupled ◽  
Ion Distributions ◽  
Capacitively Coupled Plasma

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Influence of electrodes area ratios and the discharge volume in RF capacitively coupled plasma

2019 ◽  
Vol 11 (20) ◽  
pp. 1-8
Author(s):  
Moyad Abdullah Ahmad
Keyword(s):  
Glow Discharge ◽  
Cone Angle ◽  
Experimental Results ◽  
Rf Power ◽  
Capacitively Coupled ◽  
Discharge Volume ◽  
Capacitively Coupled Plasma ◽  
Harmonic Distortions

Experimental results on harmonic distortions in 13.56 MHz RF Argon glow discharge using different grounded electrodes areas and electrodes spacing are presented. The experiment is carried out at four pressure values. RF power values used are between 20 and 90 watts. The results indicate significant increase in distortions at two specific values of the cone angle enclosing the two electrodes within its geometrical volume. The computation of the cone head angle gave the symmetry discharge or asymmetry as well as when the angle is small the condition is near symmetry discharge associated with decrease in the nonlinearity.

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