Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
2011 ◽
Vol 13
(1)
◽
pp. 61-67
◽
2010 ◽
Vol 12
(1)
◽
pp. 53-58
◽
2009 ◽
Vol 54
(9(5))
◽
pp. 317-322
◽
2008 ◽
Vol 47
(8)
◽
pp. 7005-7008
◽
Keyword(s):
2012 ◽
Vol 258
(19)
◽
pp. 7751-7754
◽
Keyword(s):