Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part II: Particle-in-Cell Simulation

IEEE Transactions on Plasma Science ◽

10.1109/tps.2008.926833 ◽

2008 ◽

Vol 36 (4) ◽

pp. 1384-1385 ◽

Author(s):

A. Meige ◽

D. O'Connell ◽

T. Gans ◽

R. W. Boswell

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Plasma Ionization ◽

Particle In Cell ◽

Cell Simulation ◽

Radio Frequency Discharges

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A comparison of particle in cell and fluid model simulations of low‐pressure radio frequency discharges

Journal of Applied Physics ◽

10.1063/1.358435 ◽

1994 ◽

Vol 76 (10) ◽

pp. 5646-5660 ◽

Author(s):

T. E. Nitschke ◽

D. B. Graves

Keyword(s):

Radio Frequency ◽

Fluid Model ◽

Low Pressure ◽

Model Simulations ◽

Particle In Cell ◽

Radio Frequency Discharges

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Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

IEEE Transactions on Plasma Science ◽

10.1109/tps.2008.927348 ◽

2008 ◽

Vol 36 (4) ◽

pp. 1382-1383 ◽

Author(s):

Deborah O'Connell ◽

Timo Gans ◽

Albert Meige ◽

Peter Awakowicz ◽

Rod W. Boswell

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Optical Measurements ◽

Plasma Ionization ◽

Radio Frequency Discharges

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Adaptive mass alteration to model ion–ion recombination in a Particle-in-Cell simulation of silane radio-frequency discharges

Computer Physics Communications ◽

10.1016/j.cpc.2010.06.033 ◽

2010 ◽

Vol 181 (10) ◽

pp. 1743-1749

Author(s):

A.V. Snytnikov ◽

V.A. Vshivkov ◽

W.J. Goedheer

Keyword(s):

Radio Frequency ◽

Particle In Cell ◽

Cell Simulation ◽

Ion Recombination ◽

Radio Frequency Discharges

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Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2368145 ◽

2014 ◽

Vol 42 (12) ◽

pp. 3819-3824 ◽

Author(s):

Jin Seok Kim ◽

Min Young Hur ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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N2–H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab9b1a ◽

2020 ◽

Vol 29 (8) ◽

pp. 085019 ◽

Author(s):

Audrey Chatain ◽

Miguel Jiménez-Redondo ◽

Ludovic Vettier ◽

Olivier Guaitella ◽

Nathalie Carrasco ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Experimental Results ◽

Capacitively Coupled ◽

Positive Ions ◽

Radio Frequency Discharges ◽

Pressure Part ◽

Ammonia Formation

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A particle-in-cell simulation of dust charging and shielding in low pressure glow discharges

IEEE Transactions on Plasma Science ◽

10.1109/27.279017 ◽

1994 ◽

Vol 22 (2) ◽

pp. 138-150 ◽

Author(s):

S.J. Choi ◽

M.J. Kushner

Keyword(s):

Low Pressure ◽

Particle In Cell ◽

Glow Discharges ◽

Cell Simulation ◽

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Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics ◽

10.1063/1.1563820 ◽

2003 ◽

Vol 93 (9) ◽

pp. 5025-5033 ◽

Author(s):

E. Neyts ◽

M. Yan ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Radio Frequency Discharge

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A continuum model for low‐pressure radio‐frequency discharges

Journal of Applied Physics ◽

10.1063/1.347451 ◽

1991 ◽

Vol 69 (12) ◽

pp. 8047-8051 ◽

Author(s):

M. Meyyappan

Keyword(s):

Radio Frequency ◽

Continuum Model ◽

Low Pressure ◽

Radio Frequency Discharges

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Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges

Physics of Plasmas ◽

10.1063/1.4831760 ◽

2013 ◽

Vol 20 (11) ◽

pp. 113509 ◽

Author(s):

T. Teichmann ◽

C. Küllig ◽

K. Dittmann ◽

K. Matyash ◽

R. Schneider ◽

...

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation

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Simulation of low-pressure capacitively coupled plasmas using a parallelized particle-in-cell simulation and a direct simulation of Monte Carlo for neutrals

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633183 ◽

2013 ◽

Author(s):

Jin Seok Kim ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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