A comparison of particle in cell and fluid model simulations of low‐pressure radio frequency discharges

1994 ◽  
Vol 76 (10) ◽  
pp. 5646-5660 ◽  
Author(s):  
T. E. Nitschke ◽  
D. B. Graves
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Low Pressure ◽  
Model Simulations ◽  
Particle In Cell ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

A particle-in-cell fluid model for radio frequency glow discharges

1993 ◽  
Vol 7 (3) ◽  
pp. 363
Author(s):  
Chihwen ‘‘Chris’’ Li ◽  
Chwan-Hwa ‘‘John’’ Wu
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Particle In Cell ◽  
Glow Discharges
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