Plasma Immersion Ion Implantation Into Inner Surface of Cylindrical Bore Using Moving Auxiliary Electrode
2011 ◽
Vol 39
(11)
◽
pp. 3120-3124
◽
Keyword(s):
1998 ◽
Vol 26
(2)
◽
pp. 175-180
◽
1999 ◽
Vol 27
(1)
◽
pp. 225-238
◽
Keyword(s):
Keyword(s):
Keyword(s):