A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas
1997 ◽
Vol 52
(13)
◽
pp. 1965-1981
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2013 ◽
Vol 55
(5)
◽
pp. 941-948
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Keyword(s):
Keyword(s):
2012 ◽
Vol 59
(2)
◽
pp. 779-792
◽
Keyword(s):