Time predictive model of charge accumulation in bulk PECVD dielectric materials used for electrostatic RF MEMS switches

2011 ◽  
Author(s):  
F. Souchon ◽  
A. Koszewski ◽  
C. Dieppedale ◽  
T. Ouisse
Keyword(s):  
Predictive Model ◽  
Rf Mems ◽  
Dielectric Materials ◽  
Charge Accumulation ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Materials Used

Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

2007 ◽  
Author(s):  
Linxian Zhan ◽  
Haisheng San ◽  
Gang Li ◽  
Peng Xu ◽  
Xuyuan Chen
Keyword(s):  
Rf Mems ◽  
Charge Accumulation ◽  
Mems Switches ◽  
Dielectric Layers ◽  
Rf Mems Switches

Investigation of charge accumulation in the dielectric for robust RF MEMS switches

2007 ◽  
Author(s):  
Xuyuan Chen ◽  
Ulrik Hanke ◽  
Haisheng San ◽  
Gang Li ◽  
Linxian Zhan
Keyword(s):  
Rf Mems ◽  
Charge Accumulation ◽  
Mems Switches ◽  
Rf Mems Switches

Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches

2007 ◽  
Author(s):  
Haisheng San ◽  
Linxian Zhan ◽  
Peng Xu ◽  
Gang Li ◽  
Xuyuan Chen
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Wave Form ◽  
Charge Accumulation ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Voltage Wave

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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