Process optimization and performance analysis of an electrostatically actuated varifocal liquid lens
2013 ◽
Vol 17
(7)
◽
pp. 1589-1596
2013 ◽
Vol 58
(30)
◽
pp. 3052-3061
2005 ◽
Vol 2
(6)
◽
pp. 493-498
◽