A novel polymer filled CMOS-MEMS inductive-type tactile sensor with wireless sensing capability

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2017.7994178 ◽

2017 ◽

Author(s):

Sheng-Kai Yeh ◽

Heng-Chung Chang ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Wireless Sensing ◽

Inductive Type ◽

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Development of CMOS MEMS inductive type tactile sensor with the integration of chrome steel ball force interface

Journal of Micromechanics and Microengineering ◽

10.1088/1361-6439/aaac24 ◽

2018 ◽

Vol 28 (4) ◽

pp. 044005 ◽

Author(s):

Sheng-Kai Yeh ◽

Heng-Chung Chang ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Chrome Steel ◽

Inductive Type ◽

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Vertically Integrated Multiple Electrode Design for Sensitivity Enhancement of CMOS-MEMS Capacitive Tactile Sensor

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808555 ◽

2019 ◽

Author(s):

Meng-Lin Hsieh ◽

Sheng-Kai Yeh ◽

Jia-Horng Lee ◽

Pen-Sheng Lin ◽

Mei-Feng Lai ◽

...

Keyword(s):

Tactile Sensor ◽

Sensitivity Enhancement ◽

Electrode Design ◽

Cmos Mems ◽

Multiple Electrode

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Novel two-stage CMOS-MEMS capacitive-type tactile-sensor with ER-fluid fill-in for sensitivity and sensing range enhancement

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2015.7181138 ◽

2015 ◽

Author(s):

Wei-Cheng Lai ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Two Stage ◽

Sensing Range ◽

Cmos Mems ◽

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A tunable range/sensitivity CMOS-MEMS capacitive tactile sensor with polymer fill-in technique

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2009.5285611 ◽

2009 ◽

Author(s):

Yu-Chia Liu ◽

Chih-Ming Sun ◽

Li-Yuan Lin ◽

Ming-Han Tsai ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Tunable Range ◽

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A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627881 ◽

2006 ◽

Author(s):

Cheng-Ting Ko ◽

Jhy-Ping Wu ◽

Wen-Chih Wang ◽

Ching-Hsiao Huang ◽

Sheng-Hsiang Tseng ◽

...

Keyword(s):

Tactile Sensor ◽

Highly Sensitive ◽

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Monolithic/Vertical Integration of Piezo-Resistive Tactile Sensor and Inductive Proximity Sensor Using CMOS-MEMS Technology

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2019.8870664 ◽

2019 ◽

Author(s):

Jia-Horng Lee ◽

Sheng-Kai Yeh ◽

Weileun Fang

Keyword(s):

Vertical Integration ◽

Tactile Sensor ◽

Proximity Sensor ◽

Mems Technology ◽

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Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.133.243 ◽

2013 ◽

Vol 133 (6) ◽

pp. 243-249 ◽

Author(s):

Mitsutoshi Makihata ◽

Masanori Muroyama ◽

Yoshihiro Nakano ◽

Takahiro Nakayama ◽

Ui Yamaguchi ◽

...

Keyword(s):

Tactile Sensor ◽

Packaging Technology ◽

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In-Process And In-Use Modulation Of Sensitivity And Sensing Range For CMOS-MEMS Tactile Sensor With Dielectric PDMS Nanocomposite

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808608 ◽

2019 ◽

Author(s):

Wei-Cheng Lai ◽

Ming-Yi Lin ◽

Ya-Chu Lee ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Sensing Range ◽

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CMOS-MEMS Tri-Axial Piezo-Resistive Tactile Sensor with Monolithically/Vertically Integrated Inductive Proximity Sensor

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808362 ◽

2019 ◽

Author(s):

Jia-Horng Lee ◽

Sheng-Kai Yeh ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Proximity Sensor ◽

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Electric Modulation on the Sensitivity and Sensing Range of CMOS-MEMS Tactile Sensor by Using the PDMS Elastomer Fill-in

IEEE Sensors Journal ◽

10.1109/jsen.2020.3037941 ◽

2020 ◽

pp. 1-1

Author(s):

Wei-Cheng Lai ◽

Meng-Lin Hsieh ◽

Weileun Fang

Keyword(s):

Tactile Sensor ◽

Sensing Range ◽

Pdms Elastomer ◽

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