Large-Scale Semiconductor Process Fault Detection Using a Fast Pattern Recognition-Based Method

2010 ◽  
Vol 23 (2) ◽  
pp. 194-200 ◽  
Author(s):  
Qinghua Peter He ◽  
Jin Wang
Keyword(s):  
Pattern Recognition ◽  
Fault Detection ◽  
Large Scale ◽  
Semiconductor Process

Fault detection algorithms for real-time diagnosis in large-scale systems

2001 ◽  
Author(s):  
Thiagalingam Kirubarajan ◽  
Venkatesh N. Malepati ◽  
Somnath Deb ◽  
Jie Ying
Keyword(s):  
Fault Detection ◽  
Real Time ◽  
Large Scale ◽  
Large Scale Systems ◽  
Detection Algorithms ◽  
Time Diagnosis

Large-scale mass spectral analysis by simplex pattern recognition

1976 ◽  
Vol 48 (12) ◽  
pp. 1768-1774 ◽  
Author(s):  
T. Fai. Lam ◽  
Charles L. Wilkins ◽  
Thomas R. Brunner ◽  
Leonard J. Soltzberg ◽  
Steven L. Kaberline
Keyword(s):  
Pattern Recognition ◽  
Spectral Analysis ◽  
Large Scale ◽  
Mass Spectral Analysis ◽  
Mass Spectral

scholarly journals Application properties of methods for fault detection and isolation in the diagnosis of complex large-scale processes

2014 ◽  
Vol 62 (3) ◽  
pp. 571-582 ◽  
Author(s):  
J.M. Kościelny ◽  
M. Syfert
Keyword(s):  
Fault Detection ◽  
Large Scale ◽  
Fault Detection And Isolation ◽  
Industrial Processes ◽  
Industrial Practice ◽  
Potential Applicability ◽  
Diagnostic Approaches ◽  
Level Of Knowledge ◽  
High Level ◽  
Selection Of

Abstract The survey presents a selection of the methods of the fault detection and isolation suitable to be useful for the diagnostics of the complex, large scale industrial processes. The paper focuses on these methods that have appropriately high level of potential applicability in industrial practice. The novelty of the paper relies on the discussion of the dependency of the level of knowledge about diagnosed process and recommended diagnostic approaches. Appropriate recommendations were given in the convenient form of the table

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