scholarly journals Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances

2019 ◽  
Author(s):  
Teona Mirea ◽  
Manuel Moreno ◽  
Nicolo Chiodarelli ◽  
Mario DeMiguel-Ramos
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Comparative Study ◽  
Real Time ◽  
Quartz Crystal ◽  
Dual Mode ◽  
Thin Film Thickness ◽  
Quartz Crystal Microbalances

Progress in monitoring thin film thickness with quartz crystal resonators

1976 ◽  
Vol 32 (1) ◽  
pp. 27-33 ◽  
Author(s):  
H.K. Pulker ◽  
E. Benes ◽  
D. Hammer ◽  
E. Söllner
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Quartz Crystal ◽  
Thin Film Thickness ◽  
Quartz Crystal Resonators

Robust Real-Time Thin Film Thickness Estimation

2006 ◽  
Author(s):  
Choon Meng Kiew ◽  
A. Tay ◽  
Weng Khuen Ho ◽  
Khiang Wee Lim ◽  
J.H. Lee
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Real Time ◽  
Thin Film Thickness ◽  
Thickness Estimation

An ellipsometric data acquisition method for thin film thickness measurement in real time

2008 ◽  
Vol 19 (4) ◽  
pp. 047002 ◽  
Author(s):  
Sang-Heon Ye ◽  
Soo Hyun Kim ◽  
Yoon Keun Kwak ◽  
Hyun Mo Cho ◽  
Yong Jai Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Data Acquisition ◽  
Real Time ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
Film Thickness Measurement ◽  
Acquisition Method

A new algorithm for real-time thin film thickness estimation given in situ multiwavelength ellipsometry using an extended Kalman filter

1998 ◽  
Vol 313-314 ◽  
pp. 156-160 ◽  
Author(s):  
C.G. Galarza ◽  
P.P. Khargonekar ◽  
N. Layadi ◽  
T.L. Vincent ◽  
E.A. Rietman ◽  
...  
Keyword(s):  
Thin Film ◽  
Kalman Filter ◽  
Film Thickness ◽  
Real Time ◽  
Extended Kalman Filter ◽  
Thin Film Thickness ◽  
Thickness Estimation

Introducing a Thermal-Based Method for Measuring Dynamic Thin Film Thickness in Real Time as a Tool for Sensing Applications

2021 ◽  
Vol 70 ◽  
pp. 1-10
Author(s):  
Gilles Oudebrouckx ◽  
Thijs Vandenryt ◽  
Philippe Nivelle ◽  
Seppe Bormans ◽  
Patrick Wagner ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Real Time ◽  
Thin Film Thickness ◽  
Sensing Applications
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