Formation of vertical links in standard CMOS double-level metallizations by application of Nd:YAG- and excimer-laser radiation

Author(s):  
H.-D. Hartmann ◽  
T. Hillmann-Ruge
1993 ◽  
Author(s):  
Sylvain Lazare ◽  
Pascale Benet ◽  
Matthias Bolle ◽  
Philipe De Donato ◽  
Eric Bernardy

1998 ◽  
Vol 24 (12) ◽  
pp. 781-785 ◽  
Author(s):  
Matthias Folwaczny ◽  
Tim Liesenhoff ◽  
Norbert Lehn ◽  
Hans-Henning Horch

1992 ◽  
Vol 285 ◽  
Author(s):  
W.W. Duley ◽  
G. Kinsman

ABSTRACTExcimer laser radiation may be used to process metal surfaces in a variety of novel ways. The simplest of these involves the use of UV laser pulses for ablation. Ablation occurs as the result of both vaporization and hydrodynamical effects. Experimental data related to these processes will be discussed. In addition, it will be shown how specific irradiation regimes can yield metal surfaces with unique radiative properties.


1990 ◽  
Vol 96 (6) ◽  
pp. 898-902 ◽  
Author(s):  
Donata. Rimoldi ◽  
Alexandra C. Miller ◽  
Steven E. Freeman ◽  
Dvorit. Samid

1992 ◽  
Vol 27 (3) ◽  
pp. 243-248 ◽  
Author(s):  
Chris F. Vernon ◽  
Craig Klauber ◽  
Paul P. van Saarloos ◽  
Traian V. Chirila

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