Excimer Laser Interaction with Metals

1992 ◽  
Vol 285 ◽  
Author(s):  
W.W. Duley ◽  
G. Kinsman

ABSTRACTExcimer laser radiation may be used to process metal surfaces in a variety of novel ways. The simplest of these involves the use of UV laser pulses for ablation. Ablation occurs as the result of both vaporization and hydrodynamical effects. Experimental data related to these processes will be discussed. In addition, it will be shown how specific irradiation regimes can yield metal surfaces with unique radiative properties.

1986 ◽  
Vol 75 ◽  
Author(s):  
Joseph Zahavi ◽  
Pehr E. Pehrsson

AbstractWe have demonstrated metal deposition on semiconductors immersed in electroplating solution by exposure to UV laser radiation. N-type β-SiC and Si in gold or Pd/Ni electroplating solutions were exposed to 20 ns pulses of 193 nm or 248 nm excimer laser radiation. The energy per pulse was 20–100 mJ. Au and Pd/Ni metallizations deposited in lines and circles on SiC showed leaky Schottky barrier I-V characteristics. The thickness increased with increasing pulse energy or number. Both masked and maskless deposition were demonstrated without apparent damage to the substrate. Details of the process, potential mechanisms, and sample characterization are discussed.


1993 ◽  
Author(s):  
Sylvain Lazare ◽  
Pascale Benet ◽  
Matthias Bolle ◽  
Philipe De Donato ◽  
Eric Bernardy

1998 ◽  
Vol 24 (12) ◽  
pp. 781-785 ◽  
Author(s):  
Matthias Folwaczny ◽  
Tim Liesenhoff ◽  
Norbert Lehn ◽  
Hans-Henning Horch

1990 ◽  
Vol 96 (6) ◽  
pp. 898-902 ◽  
Author(s):  
Donata. Rimoldi ◽  
Alexandra C. Miller ◽  
Steven E. Freeman ◽  
Dvorit. Samid

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