Characterization of strength properties of thin polycrystalline silicon films for MEMS applications

2007 ◽  
Vol 30 (1) ◽  
pp. 2-12 ◽  
Author(s):  
R. Boroch ◽  
J. Wiaranowski ◽  
R. Mueller-Fiedler ◽  
M. Ebert ◽  
J. Bagdahn
Keyword(s):  
Polycrystalline Silicon ◽  
Strength Properties ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

Characterization of thin polycrystalline silicon films deposited on glass by CVD

2012 ◽  
Vol 27 (12) ◽  
pp. 125013 ◽  
Author(s):  
A G Benvenuto ◽  
R H Buitrago ◽  
A Bhaduri ◽  
C Longeaud ◽  
J A Schmidt
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

Stresses in thin polycrystalline silicon films

1988 ◽  
Vol 162 ◽  
pp. 365-374 ◽  
Author(s):  
V.M. Koleshko ◽  
V.F. Belitsky ◽  
I.V. Kiryushin
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

The Oxidation Kinetics of Thin Polycrystalline Silicon Films

1991 ◽  
Vol 138 (1) ◽  
pp. 214-219 ◽  
Author(s):  
Yangyuan Wang ◽  
Jiang Tao ◽  
Shen Tong ◽  
Tiejun Sun ◽  
Aizhen Zhang ◽  
...  
Keyword(s):  
Oxidation Kinetics ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films ◽  
Kinetics Of

Surface and interface nitridation of thin polycrystalline silicon films

1983 ◽  
Vol 42 (11) ◽  
pp. 950-952
Author(s):  
F. H. P. M. Habraken ◽  
A. E. T. Kuiper ◽  
Y. Tamminga
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Surface And Interface ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

Structure of thin polycrystalline silicon films on ceramic substrates

2001 ◽  
Vol 223 (3) ◽  
pp. 332-340 ◽  
Author(s):  
A.J.M.M van Zutphen ◽  
P Šutta ◽  
F.D Tichelaar ◽  
A von Keitz ◽  
M Zeman ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Ceramic Substrates ◽  
Thin Polycrystalline ◽  
Polycrystalline Silicon Films

Characterization of double gate TFTs fabricated in advanced SLS ELA polycrystalline silicon films

2007 ◽  
Vol 51 (6) ◽  
pp. 936-940 ◽  
Author(s):  
Dimitrios N. Kouvatsos ◽  
Filippos V. Farmakis ◽  
Despina C. Moschou ◽  
Giannis P. Kontogiannopoulos ◽  
George J. Papaioannou ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Double Gate ◽  
Polycrystalline Silicon Films
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