Preparation and Characterization of High-Purity Metal Fluorides for Photonic Applications

2011 ◽  
Vol 94 (9) ◽  
pp. 2896-2901 ◽  
Author(s):  
Wendy M. Patterson ◽  
Peter C. Stark ◽  
Thomas M. Yoshida ◽  
Mansoor Sheik-Bahae ◽  
Markus P. Hehlen
1990 ◽  
Vol 106 (1) ◽  
pp. 51-60 ◽  
Author(s):  
E.S. Beary ◽  
P.J. Paulsen ◽  
T.C. Rains ◽  
K.J. Ewing ◽  
J. Jaganathan ◽  
...  

Author(s):  
V. C. Kannan ◽  
S. M. Merchant ◽  
R. B. Irwin ◽  
A. K. Nanda ◽  
M. Sundahl ◽  
...  

Metal silicides such as WSi2, MoSi2, TiSi2, TaSi2 and CoSi2 have received wide attention in recent years for semiconductor applications in integrated circuits. In this study, we describe the microstructures of WSix films deposited on SiO2 (oxide) and polysilicon (poly) surfaces on Si wafers afterdeposition and rapid thermal anneal (RTA) at several temperatures. The stoichiometry of WSix films was confirmed by Rutherford Backscattering Spectroscopy (RBS). A correlation between the observed microstructure and measured sheet resistance of the films was also obtained.WSix films were deposited by physical vapor deposition (PVD) using magnetron sputteringin a Varian 3180. A high purity tungsten silicide target with a Si:W ratio of 2.85 was used. Films deposited on oxide or poly substrates gave rise to a Si:W ratio of 2.65 as observed by RBS. To simulatethe thermal treatments of subsequent processing procedures, wafers with tungsten silicide films were subjected to RTA (AG Associates Heatpulse 4108) in a N2 ambient for 60 seconds at temperatures ranging from 700° to 1000°C.


2005 ◽  
Vol 53 (3) ◽  
pp. 725-729 ◽  
Author(s):  
Vanessa Cabra ◽  
Roberto Arreguin ◽  
Amanda Galvez ◽  
Maricarmen Quirasco ◽  
Rafael Vazquez-duhalt ◽  
...  
Keyword(s):  

1994 ◽  
Vol 26 (1) ◽  
pp. 1-5 ◽  
Author(s):  
A.V. Kvit ◽  
Y.V. Klevkov ◽  
S.R. Oktyabrsky ◽  
A.V. Tsikunov ◽  
B.G. Zhurkin
Keyword(s):  

2012 ◽  
Vol 125-126 ◽  
pp. 55-63 ◽  
Author(s):  
Gergo Rimaszeki ◽  
Tibor Kulcsar ◽  
Tamas Kekesi

1987 ◽  
Vol 91 (1-6) ◽  
pp. 269-274 ◽  
Author(s):  
Gerhard Kudermann ◽  
Karl-Heinz Blaufu�
Keyword(s):  

1988 ◽  
Vol 93 (3) ◽  
pp. 400 ◽  
Author(s):  
S. Gangadharan ◽  
S. Natarajan ◽  
J. Arunachalam ◽  
S. Jaikumar ◽  
S.V. Burangey
Keyword(s):  

1983 ◽  
Vol 54 (12) ◽  
pp. 6982-6988 ◽  
Author(s):  
M. Heiblum ◽  
E. E. Mendez ◽  
L. Osterling

Sign in / Sign up

Export Citation Format

Share Document