Effect of H
2
addition during PECVD on the moisture barrier property and environmental stability of H:SiN
x
film
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2017 ◽
Vol 94
(3)
◽
pp. 425-433
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2016 ◽
Vol 33
(3)
◽
pp. 1070-1074
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2016 ◽
Vol 132-133
◽
pp. 425-429
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2012 ◽
Vol 136
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pp. 247-253
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2016 ◽
Vol 55
(35)
◽
pp. 9433-9439
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2018 ◽
Vol 7
(4)
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