Structure Controlled Synthesis of Vertically Aligned Carbon Nanotubes Using Thermal Chemical Vapor Deposition Process

2010 ◽  
Vol 133 (3) ◽  
Author(s):  
Myung Gwan Hahm ◽  
Young-Kyun Kwon ◽  
Ahmed Busnaina ◽  
Yung Joon Jung

Due to their unique one-dimensional nanostructure along with excellent mechanical, electrical, and optical properties, carbon nanotubes (CNTs) become a promising material for diverse nanotechnology applications. However, large-scale and structure controlled synthesis of CNTs still have many difficulties due to the lack of understanding of the fundamental growth mechanism of CNTs, as well as the difficulty of controlling atomic-scale physical and chemical reactions during the nanotube growth process. Especially, controlling the number of graphene wall, diameter, and chirality of CNTs are the most important issues that need to be solved to harness the full potential of CNTs. Here we report the large-scale selective synthesis of vertically aligned single walled carbon nanotubes (SWNTs) and double walled carbon nanotubes (DWNTs) by controlling the size of catalyst nanoparticles in the highly effective oxygen assisted thermal chemical vapor deposition (CVD) process. We also demonstrate a simple but powerful strategy for synthesizing ultrahigh density and diameter selected vertically aligned SWNTs through the precise control of carbon flow during a thermal CVD process.

2007 ◽  
Vol 1057 ◽  
Author(s):  
Tomohiro Nozaki ◽  
Kuma Ohnishi ◽  
Ken Okazaki

ABSTRACTPlasma-enhanced chemical vapor deposition (PECVD) is recognized as one of the viable fabrication techniques of carbon nanotubes (CNTs). However, “CNTs” synthesized in low-pressure PECVD is overwhelmingly carbon nanofibers or multi-walled carbon nanotubes because catalyst and CNTs receive severe damage from ion bombardment: single-walled carbon nanotubes (SWCNTs) has been exclusively synthesized in the thermal CVD regime except few examples. We present atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD) for high-purity vertically-aligned SWCNT synthesis, because both ion-damage and radical-damage are preferentially avoided in atmospheric pressure. Tentative reaction mechanism is also discussed based gas phase chemistry analyzed by quadrupole mass spectrometer.


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