Design and Analysis of a Micro-Positioning Stage

2011 ◽  
Author(s):  
Jau-Liang Chen ◽  
Yan-Ming Chen
Keyword(s):  
Piezoelectric Actuator ◽  
Open Loop ◽  
Degree Of Freedom ◽  
Experimental Results ◽  
Flexure Hinge ◽  
Open Loop Control ◽  
Maximum Displacement ◽  
Rotational Angle ◽  
Loop Control ◽  
Positioning Stage

The purpose of this research is trying to design a 6 degree-of-freedom micro-precision positioning stage with monolithic mechanism. It is hoped that this stage can reach 10 μm strokes along linear axis and with rotational angle no less than 50 μrad. The dimension of this positioning stage should be less than 200 mm × 200 mm × 50 mm. By using flexure hinge and piezoelectric actuator, this stage can achieve nanometer resolution. From the experimental results, it is found that the stage can achieve a maximum displacement of 29.3 μm in X axis; 11.94 μm in Y axis; and 6.74 μm in Z axis. The stage can also achieve a maximum rotation of 405.41 μrad around Z axis; 57.18 μrad around X axis; and 63.72 μrad around Y axis. With open loop control, we have shown that the minimum step for the stage is 110 nm in X-axis; 45 nm in Y axis; and 30 nm in Z-axis.

Precision open-loop control of piezoelectric actuator

2021 ◽  
pp. 1045389X2110482
Author(s):  
Zhigang Nie ◽  
Yuguo Cui ◽  
Jun Huang ◽  
Yiqiang Wang ◽  
Tehuan Chen
Keyword(s):  
Piezoelectric Actuator ◽  
Open Loop ◽  
Simple Expression ◽  
Creep Model ◽  
Open Loop Control ◽  
Maximum Displacement ◽  
Loop Control ◽  
Hysteresis Compensation ◽  
Rate Dependent ◽  
Partition Method

Due to space constraints, some micro-assemblies and micro-operating systems cannot install sensors, so it is challenging to achieve closed-loop control. For this reason, a precision open-loop control strategy for piezoelectric actuators is proposed. Firstly, based on the PI model and the proposed threshold partition method, the hysteresis model of the piezoelectric actuator with rate-dependent and few operators is established. Then the hysteresis error of the piezoelectric actuator is compensated by the inverse model obtained. Secondly, the creep model of the logarithmic piezoelectric actuator with simple expression and few parameters is established. Then, a creep controller without demand inverse is designed to compensate for the creep error of the piezoelectric actuator. Finally, a ZVD (Zero Vibration Derivative) input shaping method with good robustness is given to eliminate the oscillation generated by the piezoelectric actuator under the action of the step signal. The experimental results show that the displacement error of piezoelectric actuator is reduced from −9.07 to 9.46 μm to −1.22 to 1.78 μm when the maximum displacement is 120 μm after hysteresis compensation; after creeping compensation, within the action time of the 1200 s, the displacement creep of the piezoelectric actuator was reduced from 5.5 μm before compensation to 0.3 μm; after the oscillation control, the displacement overshoot of the piezoelectric actuator is reduced to 0.6% of that before control.

scholarly journals Open loop control of piezoelectric tube transducer

2018 ◽  
Vol 38 (1) ◽  
pp. 23-28 ◽  
Author(s):  
Frederik Stefanski ◽  
Bartosz Minorowicz
Keyword(s):  
Piezoelectric Actuator ◽  
Harmonic Functions ◽  
Open Loop ◽  
Control Line ◽  
Positioning Error ◽  
Open Loop Control ◽  
Hysteresis Model ◽  
Modeling Error ◽  
Loop Control ◽  
Inverse Hysteresis

Abstract This paper is focused on the open loop control of a piezoelectric tube actuator, hindered by a strong hysteresis. The actuator was distinguished with 22 % hysteresis, which hinders the positioning of piezoelectric actuator. One of the possible ways to solve this problem is application of an accurate analytical inversed model of the hysteresis in the control loop. In this paper generalized Prandtl-Ishlinskii model was used for both modeling and open loop control of the piezoelectric actuator. Achieved modeling error does not exceed max. 2.34 % of the whole range of tube deflection. Finally, the inverse hysteresis model was applied to the control line of the tube. For the same input signal (damped sine 0.2 Hz) as for the model estimation the positioning error was max. 4.6 % of the tube deflection. Additionally, for a verification reason three different complex harmonic functions were applied. For the verification functions, still a good positioning was obtained with positioning error of max.4.56 %, 6.75 %and5.6%of the tube deflection.

A sketch drawing humanoid robot using image-based visual servoing

2019 ◽  
Vol 34 ◽  
Author(s):  
Meng-Cheng Lau ◽  
John Anderson ◽  
Jacky Baltes
Keyword(s):  
Error Correction ◽  
Visual Servoing ◽  
Humanoid Robot ◽  
Closed Loop ◽  
Open Loop ◽  
Experimental Results ◽  
Drawing Process ◽  
Open Loop Control ◽  
Loop Control ◽  
Error Correction Capability

Abstract This paper presents our sketch drawing artist humanoid robot research. One of the limitations of the existing artist humanoid robot is the lack of feedback on the error that occurs during the drawing process. The contribution of this research is the development of a humanoid robot artist with drawing error correction capability. Based on our previous work with open-loop control pen-and-ink humanoid robot artist, we have implemented a closed-loop visual servoing approach to address this problem. Our experimental results show that this approach is sufficient to correct drawing errors that occur due to mechanical limitation of a robot.

Multi-DOF compensation of piezoelectric actuators with recursive databases

2018 ◽  
Vol 66 (8) ◽  
pp. 656-664 ◽  
Author(s):  
Christopher Schindlbeck ◽  
Christian Pape ◽  
Eduard Reithmeier
Keyword(s):  
Tracking Control ◽  
Control Design ◽  
Cross Coupling ◽  
Piezoelectric Actuators ◽  
Nonlinear Effects ◽  
Open Loop ◽  
Degree Of Freedom ◽  
Decoupling Control ◽  
Open Loop Control ◽  
Loop Control

Abstract Piezoelectric actuators are subject to nonlinear effects when voltage-driven in open-loop control. In particular, hysteresis and creep effects are dominating nonlinearities that significantly deteriorate performance in tracking control scenarios. In this paper, we present an online compensator suitable for piezoelectric actuators that is based on the modified Prandtl-Ishlinskii model and utilizes recursive databases for the compensation of nonlinearities. The compensator scheme is furthermore extended to systems with more than one degree of freedom (DOF) such as Cartesian manipulators by employing a decoupling control design to mitigate inherent cross-coupling disturbances. In order to validate our theoretical derivations, experiments are conducted with coupled trajectories on a commercial 3-DOF micro-positioning unit driven by piezoelectric actuators.

The open-loop control of MEMS: modeling and experimental results

2007 ◽  
Author(s):  
Katie M. Morzinski ◽  
Kennet B. W. Harpsøe ◽  
Don T. Gavel ◽  
S. Mark Ammons
Keyword(s):  
Open Loop ◽  
Experimental Results ◽  
Open Loop Control ◽  
Loop Control ◽  
Mems Modeling

Open-Loop Control of a Flexible Manipulator With Two Links: Experimental Results

2001 ◽  
Author(s):  
G. Mimmi ◽  
L. Frosini ◽  
P. Pennacchi ◽  
C. Rottenbacher
Keyword(s):  
Open Loop ◽  
Experimental Results ◽  
Flexible Manipulator ◽  
Control Technique ◽  
Open Loop Control ◽  
Residual Vibration ◽  
Rectangular Section ◽  
Loop Control ◽  
System Parameters ◽  
Set Up

Abstract This paper describes the experimental results of an open-loop control technique applied to a flexible manipulator, specially designed for space duties, in order to reduce the residual vibrations at the end of the positioning. The experimental set-up is a system with two flexible links with rectangular section connected by rotational joints. First, the experimental identification of the system parameters has been carried out. Then, four different motion inputs have been implemented. The performances of these motion inputs are compared in terms of residual vibration at the end of the positioning. The experimental results confirm the effectiveness of the motion input pre-shaping technique in the reduction of the residual vibrations.

Hysteresis compensation of piezoelectric actuator for open-loop control

2013 ◽  
Vol 11 (s2) ◽  
pp. S21202-321205 ◽  
Author(s):  
Geng Wang Geng Wang ◽  
Chunlin Guan Chunlin Guan ◽  
Hong Zhou Hong Zhou ◽  
Xiaojun Zhang Xiaojun Zhang ◽  
Changhui Rao Changhui Rao
Keyword(s):  
Piezoelectric Actuator ◽  
Open Loop ◽  
Open Loop Control ◽  
Loop Control ◽  
Hysteresis Compensation
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