Characterization of Static Behavior of Electrostatically Actuated Micro Tweezers Using Modified Couple Stress Theory

Author(s):  
Ali Darvishian ◽  
Hamid Moeenfard ◽  
Nasser Ghaderi ◽  
Mohammad Taghi Ahmadian

In this paper, static behavior and pull-in of micro tweezers is studied. The micro tweezer is modelled as two cantilever beams. Static behavior of the micro tweezer under the effect of electrostatic actuation is modelled using the Euler-Bernoulli beam theory. In order to capture size effects on the behavior of micro tweezers, modified couple stress theory is utilized. It is shown when the voltage between two electrodes increased from some specific value, micro beams adhere to each other and it is observed that the pull-in voltage predicted by the modified couple stress theory considerably differs with that of the classical theory of elasticity. Results of this paper can be used for accurate design, synthesis and optimization of micro tweezers.

2015 ◽  
Vol 07 (06) ◽  
pp. 1550090 ◽  
Author(s):  
M. Mojahedi ◽  
M. Rahaeifard

This paper deals with the static behavior of an electrostatically actuated bilayered microswitch on the basis of the modified couple stress theory. The beam is modeled using Euler–Bernoulli beam theory and equivalent elastic modulus and length scale parameter are presented for the bilayer beam. Static deflection and pull-in voltage of the beam is calculated using numerical and analytical methods. The numerical method is based on an iterative approach while the homotopy perturbation method (HPM) is utilized for the analytical simulation. Results show that there is a very good agreement between these methods even in the vicinity of the pull-in instability. Moreover, the effects of different parameters such as thicknesses of layers and length scale parameter on the static deflection and instability of the microcantilever are studied. Results show that for the cases with the equivalent length scale parameter comparable to the thickness of beam, the size-dependency plays significant roles in the static behavior of the bilayer microcantilevers.


2017 ◽  
Vol 17 (03) ◽  
pp. 1750033 ◽  
Author(s):  
Şeref Doğuşcan Akbaş

In this study, the free vibration analysis of edge cracked cantilever microscale beams composed of functionally graded material (FGM) is investigated based on the modified couple stress theory (MCST). The material properties of the beam are assumed to change in the height direction according to the exponential distribution. The cracked beam is modeled as a modification of the classical cracked-beam theory consisting of two sub-beams connected by a massless elastic rotational spring. The inclusion of an additional material parameter enables the new beam model to capture the size effect. The new nonclassical beam model reduces to the classical one when the length scale parameter is zero. The problem considered is investigated using the Euler–Bernoulli beam theory by the finite element method. The system of equations of motion is derived by Lagrange’s equations. To verify the accuracy of the present formulation and results, the frequencies obtained are compared with the results available in the literature, for which good agreement is observed. Numerical results are presented to investigate the effect of crack position, beam length, length scale parameter, crack depth, and material distribution on the natural frequencies of the edge cracked FG microbeam. Also, the difference between the classical beam theory (CBT) and MCST is investigated for the vibration characteristics of the beam of concern. It is believed that the results obtained herein serve as a useful reference for research of similar nature.


Author(s):  
M. H. Kahrobaiyan ◽  
M. Khajehpour ◽  
M. T. Ahmadian

In this paper, the modified couple stress theory is employed to develop a size-dependent beam element able to predict the size-dependency observed in microbeams. The stiffness matrix is obtained for the aforementioned beam element. As an example, the deflection of a microcantilever is evaluated using the proposed beam elements and the results of the finite element method are compared to the analytical results obtained by the classical beam theory. The maximum deflection of the beam is depicted versus the ratio of the beam thickness to the material length scale parameter, the parameter appearing in non-classical continuum theories. The results show that when the characteristic size of the beam (thickness, diameter, etc) is small, like the beam used in MEMS and NEMS, the difference between the results of the current model and those obtained by the classical beam theory is significant but it diminishes as the characteristic size increases.


2011 ◽  
Vol 335-336 ◽  
pp. 633-640 ◽  
Author(s):  
Jun Feng Zhao ◽  
Shen Jie Zhou ◽  
Bing Lei Wang

A modified continuum model of electro-statically actuated micro-beam is presented based on the modified couple stress theory. The new model contains a material length scale parameter and can capture the size effect, unlike the classical Bernoulli-Euler beam theory. The governing equation of the micro-beam is derived based on the Hamilton’s principle, which accounts for the effects of the moderately large deflection, the residual stress and the fringing electrostatic field. The numerical analysis of mechanical characterization is performed by the Analog Equation Method (AEM). The effects of the couple stress on the static and dynamic responses, pull-in voltage and pull-in time are discussed.


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