Ti, TiN, and Ti/TiN thin films prepared by ion beam assisted deposition as diffusion barriers between Cu and Si

2000 ◽  
Vol 18 (5) ◽  
pp. 2312 ◽  
Author(s):  
Haicuan Mu ◽  
Yuehui Yu ◽  
E. Z. Luo ◽  
B. Sundaravel ◽  
S. P. Wong ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Diffusion Barriers ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Low grain size TiN thin films obtained by low energy ion beam assisted deposition

2001 ◽  
Vol 173 (3-4) ◽  
pp. 290-295 ◽  
Author(s):  
J.M. López ◽  
F.J. Gordillo-Vázquez ◽  
O. Böhme ◽  
J.M. Albella
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

scholarly journals Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition.

2001 ◽  
Vol 44 (1) ◽  
pp. 94-99 ◽  
Author(s):  
Toshiyuki HAYASHI ◽  
Akihito MATSUMURO ◽  
Tomohiko WATANABE ◽  
Toshihiko MORI ◽  
Yutaka TAKAHASHI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Preferred Orientation ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Ion-Beam-Assisted Deposition of TiN Thin Films

1993 ◽  
Vol 32 (Part 1, No. 8) ◽  
pp. 3414-3419 ◽  
Author(s):  
Hiroshi Kubota ◽  
Jen Sue Chen ◽  
Masanori Nagata ◽  
Elzbieta Kolawa ◽  
Marc Aurele Nicolet
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

scholarly journals Variation in the Preferred Orientations of TiN Thin Films Prepared by Ion-Beam-Assisted Deposition.

1999 ◽  
Vol 65 (9) ◽  
pp. 1340-1344 ◽  
Author(s):  
Toshiyuki HAYASHI ◽  
Akihito MATSUMURO ◽  
Mutsuo MURAMATSU ◽  
Masao KOHZAKI ◽  
Yutaka TAKAHASHI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

scholarly journals Variation in Preferred Orientations of TiN Thin Films Prepared by Ion Beam Assisted Deposition

2001 ◽  
Vol 50 (3Appendix) ◽  
pp. 1-6
Author(s):  
Akihito MATSUMURO ◽  
Toshiyuki HAYASHI ◽  
Mutsuo MURAMATSU ◽  
Yutaka TAKAHASHI ◽  
Masao KOHZAKI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Oxidation of TiN thin films in an ion-beam-assisted deposition process

1994 ◽  
Vol 82-83 ◽  
pp. 565-568 ◽  
Author(s):  
Hiroshi Kubota ◽  
Masanori Nagata ◽  
Ryuji Miyagawa ◽  
Marc Aurele Nicolet
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Deposition Process ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Low energy ion beam assisted deposition of TiN thin films on silicon

2000 ◽  
Vol 42 (6) ◽  
pp. 573-579 ◽  
Author(s):  
J.-H Huang ◽  
C.-H Lin ◽  
C.-H Ma ◽  
Haydn Chen
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition
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