Low energy ion beam assisted deposition of TiN thin films on silicon

2000 ◽  
Vol 42 (6) ◽  
pp. 573-579 ◽  
Author(s):  
J.-H Huang ◽  
C.-H Lin ◽  
C.-H Ma ◽  
Haydn Chen
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Low grain size TiN thin films obtained by low energy ion beam assisted deposition

2001 ◽  
Vol 173 (3-4) ◽  
pp. 290-295 ◽  
Author(s):  
J.M. López ◽  
F.J. Gordillo-Vázquez ◽  
O. Böhme ◽  
J.M. Albella
Keyword(s):  
Thin Films ◽  
Grain Size ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Low-energy ion beam-assisted deposition of giant magnetoresistive thin films

1996 ◽  
Vol 79 (8) ◽  
pp. 4939
Author(s):  
S. J. Guilfoyle ◽  
R. J. Pollard ◽  
P. J. Grundy
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Assisted Deposition

scholarly journals Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition.

2001 ◽  
Vol 44 (1) ◽  
pp. 94-99 ◽  
Author(s):  
Toshiyuki HAYASHI ◽  
Akihito MATSUMURO ◽  
Tomohiko WATANABE ◽  
Toshihiko MORI ◽  
Yutaka TAKAHASHI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Preferred Orientation ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

Ion-Beam-Assisted Deposition of TiN Thin Films

1993 ◽  
Vol 32 (Part 1, No. 8) ◽  
pp. 3414-3419 ◽  
Author(s):  
Hiroshi Kubota ◽  
Jen Sue Chen ◽  
Masanori Nagata ◽  
Elzbieta Kolawa ◽  
Marc Aurele Nicolet
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films

scholarly journals Variation in the Preferred Orientations of TiN Thin Films Prepared by Ion-Beam-Assisted Deposition.

1999 ◽  
Vol 65 (9) ◽  
pp. 1340-1344 ◽  
Author(s):  
Toshiyuki HAYASHI ◽  
Akihito MATSUMURO ◽  
Mutsuo MURAMATSU ◽  
Masao KOHZAKI ◽  
Yutaka TAKAHASHI ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Tin Thin Films
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