Ion-Beam-Assisted Deposition of TiN Thin Films
1993 ◽
Vol 32
(Part 1, No. 8)
◽
pp. 3414-3419
◽
2004 ◽
Vol 18
(9)
◽
pp. 1003-1010
◽
1999 ◽
Vol 65
(9)
◽
pp. 1340-1344
◽
2001 ◽
Vol 50
(3Appendix)
◽
pp. 1-6
2000 ◽
Vol 42
(6)
◽
pp. 573-579
◽