Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon–silane capacitive radio-frequency plasmas
2002 ◽
Vol 20
(1)
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pp. 153-159
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Keyword(s):
1995 ◽
Vol 50
(4-7)
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pp. 617-638
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2020 ◽
Vol 927
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pp. 012029
Keyword(s):
Keyword(s):
2011 ◽
Vol 20
(1)
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pp. 015011
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