Mass spectrometric studies of low pressure CH[sub 4], CH[sub 4]/H[sub 2], and H[sub 2] plasma beams generated by an inductively coupled radio frequency discharge
2002 ◽
Vol 20
(6)
◽
pp. 1835
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Keyword(s):
Keyword(s):
1998 ◽
Vol 7
(4)
◽
pp. 607-616
◽
Keyword(s):
1998 ◽
Vol 16
(1)
◽
pp. 300-305
◽
Keyword(s):
Keyword(s):