Compensation for transient chamber wall condition using real-time plasma density feedback control in an inductively coupled plasma etcher

2003 ◽  
Vol 21 (3) ◽  
pp. 706-717 ◽  
Author(s):  
Pete I. Klimecky ◽  
J. W. Grizzle ◽  
Fred L. Terry
Keyword(s):  
Feedback Control ◽  
Real Time ◽  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Chamber Wall ◽  
Inductively Coupled ◽  
Wall Condition

Simulations of a Feedback Control Scheme for an Inductively Coupled Plasma Source for Etching Applications

1996 ◽  
Vol 143 (4) ◽  
pp. 1375-1383 ◽  
Author(s):  
Naoki Yamada ◽  
Peter L. G. Ventzek ◽  
Y. Sakai ◽  
H. Tagashira ◽  
K. Kitamori
Keyword(s):  
Feedback Control ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled ◽  
Control Scheme

Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources

2010 ◽  
Vol 17 (10) ◽  
pp. 103503 ◽  
Author(s):  
Zhipeng Chen ◽  
Hong Li ◽  
Bin Li ◽  
Chen Luo ◽  
Jinlin Xie ◽  
...  
Keyword(s):  
Linear Combination ◽  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Plasma Sources ◽  
Inductively Coupled

scholarly journals Real-time feedback control of the plasma density profile on ASDEX Upgrade

2011 ◽  
Vol 51 (4) ◽  
pp. 043002 ◽  
Author(s):  
A. Mlynek ◽  
M. Reich ◽  
L. Giannone ◽  
W. Treutterer ◽  
K. Behler ◽  
...  
Keyword(s):  
Feedback Control ◽  
Real Time ◽  
Plasma Density ◽  
Density Profile ◽  
Plasma Density Profile

Relation between the CF2 radical and plasma density measured using LIF and cutoff probe in a CF4 inductively coupled plasma

2004 ◽  
Vol 85 (11) ◽  
pp. 1922-1924 ◽  
Author(s):  
Jung-Hyung Kim ◽  
Yong-Hyeon Shin ◽  
Kwang-Hwa Chung ◽  
Yong-Shim Yoo
Keyword(s):  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor

2002 ◽  
Vol 20 (1) ◽  
pp. 43-52 ◽  
Author(s):  
Saurabh J. Ullal ◽  
Anna R. Godfrey ◽  
Erik Edelberg ◽  
Linda Braly ◽  
Vahid Vahedi ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Chamber Wall ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor
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