inductively coupled plasma reactor
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Effects of Gas Pressure on the Plasma Properties in a Radial Small Size Inductively Coupled Plasma Reactor

2019 ◽  
Vol 47 (8) ◽  
pp. 4026-4031
Author(s):  
Ling Zhang ◽  
Guo Chen ◽  
Xing Ai ◽  
Xiao-Shan He ◽  
Zhi-Bing He ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Gas Pressure ◽  
Plasma Properties ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor

scholarly journals Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry

2018 ◽  
Vol 47 (9) ◽  
pp. 4964-4969 ◽  
Author(s):  
Jean-Pierre Landesman ◽  
Daniel T. Cassidy ◽  
Marc Fouchier ◽  
Erwine Pargon ◽  
Christophe Levallois ◽  
...  
Keyword(s):  
Mechanical Stress ◽  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Plasma Chemistry ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor

Synthesis of thin silicon carbonitride films from hexamethyldisilazane in an inductively coupled plasma reactor

2015 ◽  
Vol 51 (9) ◽  
pp. 897-902 ◽  
Author(s):  
Yu. M. Rumyantsev ◽  
M. N. Chagin ◽  
M. L. Kosinova ◽  
F. A. Kuznetsov
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Silicon Carbonitride ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor ◽  
Thin Silicon

Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations

AIChE Journal ◽  
2014 ◽  
Vol 60 (10) ◽  
pp. 3647-3664 ◽  
Author(s):  
Sangeeta B. Punjabi ◽  
Sunil N. Sahasrabudhe ◽  
S. Ghorui ◽  
A. K. Das ◽  
Narendra K. Joshi ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Experimental Measurements ◽  
Cfd Simulations ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor
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