inductively coupled plasma reactor
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scholarly journals Mechanical Stress in InP Structures Etched in an Inductively Coupled Plasma Reactor with Ar/Cl2/CH4 Plasma Chemistry

2018 ◽  
Vol 47 (9) ◽  
pp. 4964-4969 ◽  
Author(s):  
Jean-Pierre Landesman ◽  
Daniel T. Cassidy ◽  
Marc Fouchier ◽  
Erwine Pargon ◽  
Christophe Levallois ◽  
...  
Keyword(s):  
Mechanical Stress ◽  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Plasma Chemistry ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor

Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations

AIChE Journal ◽  
2014 ◽  
Vol 60 (10) ◽  
pp. 3647-3664 ◽  
Author(s):  
Sangeeta B. Punjabi ◽  
Sunil N. Sahasrabudhe ◽  
S. Ghorui ◽  
A. K. Das ◽  
Narendra K. Joshi ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Reactor ◽  
Experimental Measurements ◽  
Cfd Simulations ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Reactor
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