Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition
2004 ◽
Vol 22
(1)
◽
pp. 22
◽
Keyword(s):
Ion Beam
◽
2012 ◽
Vol 51
◽
pp. 065001
◽
2000 ◽
Vol 18
(6)
◽
pp. 3181
◽
2007 ◽
pp. 179-196
◽
2010 ◽
pp. 211-229
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