Miniaturization process of the three-dimensional nanostructure fabricated by focused-ion-beam chemical vapor deposition

2021 ◽  
Author(s):  
Reo Kometani ◽  
Moe Katsuda
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

2000 ◽  
Vol 18 (6) ◽  
pp. 3181 ◽  
Author(s):  
Shinji Matsui ◽  
Takashi Kaito ◽  
Jun-ichi Fujita ◽  
Masanori Komuro ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3874-3876 ◽  
Author(s):  
Takahiko Morita ◽  
Keiichiro Watanabe ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Mold Fabrication
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