Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes

2004 ◽  
Vol 22 (6) ◽  
pp. 3158 ◽  
Author(s):  
T. Hoshino ◽  
M. Kawamori ◽  
T. Suzuki ◽  
S. Matsui ◽  
K. Mabuchi
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nerve Electrodes

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

2000 ◽  
Vol 18 (6) ◽  
pp. 3181 ◽  
Author(s):  
Shinji Matsui ◽  
Takashi Kaito ◽  
Jun-ichi Fujita ◽  
Masanori Komuro ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3874-3876 ◽  
Author(s):  
Takahiko Morita ◽  
Keiichiro Watanabe ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Mold Fabrication
Sign in / Sign up

Export Citation Format

Share Document