Three-dimensional GaN nano-structure fabrication by focused ion beam chemical vapor deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.08.130 ◽

2006 ◽

Vol 242 (1-2) ◽

pp. 250-252 ◽

Author(s):

T. Nagata ◽

P. Ahmet ◽

Y. Yamauchi ◽

Y. Sakuma ◽

T. Sekiguchi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Download Full-text

In-situObservation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope

Applied Physics Express ◽

10.1143/apex.1.055001 ◽

2008 ◽

Vol 1 ◽

pp. 055001 ◽

Author(s):

Reo Kometani ◽

Sunao Ishihara ◽

Takashi Kaito ◽

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nano Structure ◽

Scanning Electron

Download Full-text

Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.065001 ◽

2012 ◽

Vol 51 ◽

pp. 065001 ◽

Author(s):

Dengji Guo ◽

Reo Kometani ◽

Shin'ichi Warisawa ◽

Sunao Ishihara

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text

Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1821581 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3158 ◽

Author(s):

T. Hoshino ◽

M. Kawamori ◽

T. Suzuki ◽

S. Matsui ◽

K. Mabuchi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nerve Electrodes

Download Full-text

Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1633281 ◽

2004 ◽

Vol 22 (1) ◽

pp. 22 ◽

Author(s):

K. Watanabe ◽

T. Morita ◽

R. Kometani ◽

T. Hoshino ◽

K. Kondo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Download Full-text

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1319689 ◽

2000 ◽

Vol 18 (6) ◽

pp. 3181 ◽

Author(s):

Shinji Matsui ◽

Takashi Kaito ◽

Jun-ichi Fujita ◽

Masanori Komuro ◽

Kazuhiro Kanda ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text

THREE-DIMENSIONAL NANOSTRUCTURE FABRICATION BY FOCUSED-ION-BEAM CHEMICAL-VAPOR-DEPOSITION

Annual Review of Nano Research ◽

10.1142/9789814280525_0008 ◽

2009 ◽

pp. 351-383 ◽

Author(s):

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text

Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215282 ◽

2004 ◽

Author(s):

S. Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text

Miniaturization process of the three-dimensional nanostructure fabricated by focused-ion-beam chemical vapor deposition

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ac3525 ◽

2021 ◽

Author(s):

Reo Kometani ◽

Moe Katsuda

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Download Full-text

Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

Springer Handbook of Nanotechnology ◽

10.1007/978-3-540-29857-1_6 ◽

2007 ◽

pp. 179-196 ◽

Author(s):

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text

Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

Springer Handbook of Nanotechnology ◽

10.1007/978-3-642-02525-9_7 ◽

2010 ◽

pp. 211-229 ◽

Author(s):

Shinji Matsui

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Nanostructure Fabrication

Download Full-text