Etching mechanism of MgO thin films in inductively coupled Cl2∕Ar plasma
2004 ◽
Vol 22
(5)
◽
pp. 2101-2106
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2008 ◽
Vol 85
(2)
◽
pp. 348-354
◽
2003 ◽
Vol 21
(6)
◽
pp. 1837-1842
◽
2003 ◽
Vol 4
(3)
◽
pp. 1-4
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