Etching Mechanism of ZnO Thin Films in Inductively Coupled Plasma
2007 ◽
pp. 65-68
Keyword(s):
2008 ◽
Vol 202
(22-23)
◽
pp. 5705-5708
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2011 ◽
Vol 11
(4)
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pp. S30-S32
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Keyword(s):
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2005 ◽
Vol 23
(4)
◽
pp. 898-904
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2012 ◽
Vol 13
(1)
◽
pp. 6-9
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Keyword(s):
2010 ◽
Vol 23
(12)
◽
pp. 915-918