Plasma-surface interactions of nanoporous silica during plasma-based pattern transfer using C4F8 and C4F8∕Ar gas mixtures

2005 ◽  
Vol 23 (1) ◽  
pp. 151-164 ◽  
Author(s):  
Xuefeng Hua ◽  
Christian Stolz ◽  
G. S. Oehrlein ◽  
P. Lazzeri ◽  
N. Coghe ◽  
...  
Keyword(s):  
Surface Interactions ◽  
Gas Mixtures ◽  
Nanoporous Silica ◽  
Pattern Transfer ◽  
Plasma Surface ◽  
Plasma Surface Interactions ◽  
Ar Gas

Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

2012 ◽  
Vol 76 (6) ◽  
pp. 683-686 ◽  
Author(s):  
N. V. Mamedov ◽  
V. A. Kurnaev ◽  
D. V. Ivanov ◽  
D. N. Sinel’nikov
Keyword(s):  
Surface Interactions ◽  
Plasma Surface ◽  
Ion Spectroscopy ◽  
Plasma Surface Interactions
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