True three-dimensional proximity effect correction in electron-beam lithography
Three-Dimensional Proximity Effect Correction for Multilayer Structures in Electron Beam Lithography
2004 ◽
Vol 43
(6B)
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pp. 3762-3766
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2017 ◽
Vol 35
(5)
◽
pp. 051603
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1997 ◽
Vol 36
(Part 1, No. 12B)
◽
pp. 7546-7551
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1993 ◽
Vol 11
(5)
◽
pp. 1906
2004 ◽
Vol 22
(6)
◽
pp. 2923
◽
Keyword(s):
Keyword(s):