scholarly journals Ultradeep electron cyclotron resonance plasma etching of GaN

2017 ◽  
Vol 35 (6) ◽  
pp. 061303 ◽  
Author(s):  
Sara E. Harrison ◽  
Lars F. Voss ◽  
Andrea M. Torres ◽  
Clint D. Frye ◽  
Qinghui Shao ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

ICl/Ar electron cyclotron resonance plasma etching of III–V nitrides

1996 ◽  
Vol 69 (10) ◽  
pp. 1426-1428 ◽  
Author(s):  
C. B. Vartuli ◽  
S. J. Pearton ◽  
J. W. Lee ◽  
J. Hong ◽  
J. D. MacKenzie ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Ultralow damage depth by electron cyclotron resonance plasma etching of GaAs/InGaAs quantum wells

1993 ◽  
Vol 62 (10) ◽  
pp. 1137-1139 ◽  
Author(s):  
T. Bickl ◽  
B. Jacobs ◽  
J. Straka ◽  
A. Forchel
Keyword(s):  
Quantum Wells ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Damage Depth ◽  
Resonance Plasma

Development of a high-selectivity process for electron cyclotron resonance plasma etching of II-VI semiconductors

2002 ◽  
Vol 31 (7) ◽  
pp. 749-753 ◽  
Author(s):  
A. J. Stoltz ◽  
J. D. Benson ◽  
M. thomas ◽  
P. R. Boyd ◽  
M. Martinka ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
High Selectivity ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of HgTe-CdTe superlattices grown by photo-assisted molecular beam epitaxy

1995 ◽  
Vol 24 (9) ◽  
pp. 1201-1206 ◽  
Author(s):  
K. A. Harris ◽  
D. W. Endres ◽  
R. W. Yanka ◽  
L. M. Mohnkern ◽  
A. R. Reisinger ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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