Use of laser reflectometry for end-point detection during the etching of magnetic thin films
1997 ◽
Vol 15
(4)
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pp. 2069-2073
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1992 ◽
Vol 191
(3-4)
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pp. 525-529
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1987 ◽
Vol 198
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pp. 325-328
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2000 ◽
Vol 48
(7)
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pp. 2812-2817
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