T-gate, Γ-gate, and air-bridge fabrication for monolithic microwave integrated circuits by mixed ion-beam, high-voltage electron-beam, and optical lithography

1992 ◽  
Vol 10 (6) ◽  
pp. 2927 ◽  
Author(s):  
R. G. Woodham
Keyword(s):  
Electron Beam ◽  
Integrated Circuits ◽  
High Voltage ◽  
Ion Beam ◽  
Optical Lithography ◽  
Microwave Integrated Circuits ◽  
Monolithic Microwave Integrated Circuits ◽  
Voltage Electron ◽  
High Voltage Electron

Superhigh dust charging by high-voltage electron beam

2011 ◽  
Vol 94 (5) ◽  
pp. 55001 ◽  
Author(s):  
V. E. Fortov ◽  
A. V. Gavrikov ◽  
O. F. Petrov ◽  
V. S. Sidorov ◽  
M. N. Vasiliev ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Voltage Electron ◽  
High Voltage Electron ◽  
Dust Charging

Lower submicron pattern definition by high-voltage electron-beam lithography

1982 ◽  
Vol 18 (20) ◽  
pp. 880 ◽  
Author(s):  
M. Yoshimi ◽  
K. Kawabuchi ◽  
T. Takigawa ◽  
M. Takahashi ◽  
Y. Kato
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Electron Beam Lithography ◽  
Voltage Electron ◽  
High Voltage Electron
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