Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

2021 ◽  
Vol 39 (3) ◽  
pp. 032410
Author(s):  
Romel Hidayat ◽  
Hye-Lee Kim ◽  
Hohoon Kim ◽  
Younghun Byun ◽  
Jongsoo Lee ◽  
...  
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