FEM modeling of solidly mounted film bulk acoustic resonator and gas sensor using PIB-sensitive layer
2017 ◽
Vol 16
(2)
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pp. 025002
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2008 ◽
Vol 55
(5)
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pp. 1237-1243
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2017 ◽
Vol 27
(5)
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pp. 055017
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2010 ◽
Vol 150
(1)
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pp. 483-486
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