White-light interferometric technique has been widely applied in the measurement of
three-dimensional profiles and roughness with high-precision. Based on the characteristic of
interferometric technique, a new method combined with image location and a three-dimensional
stage is proposed to achieve the non-contact absolute shape measurement for aspheric and spherical
surface in a slarge range. The interference fringes vary with the horizontal displacement of the
measured surface, the surface information was obtained by locating the transformation of the
maximal intensity in the interferograms. Two main influence factors are discussed; they are
performance of the inerferimetric microscope and the stage. Since the performance of the stage
directly determines the measurement precision, a three-dimensional displacement stage with a large
range and a high precision was developed. Some experiments were carried out to verify the
performance of the three-dimensional displacement stage and the validity of the new measurement
method with satisfactory results.
Optical Design of the Goaly3 Multi-Mirror Telescope System with a Wide Field of View
