Theoretical study and computer simulations of submicron linewidth measurement using optical phase-shifting interferometry

1993 ◽  
Author(s):  
Yiping Xu
2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell

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